Welcome! k-Space is a leading supplier of advanced in situ and ex situ instrumentation for the surface science and thin-film technology industries. Stop by booth 304 to see the latest in thin-film metrology for curvature & stress, temperature, and more.
k-Space Associates, Inc. (www.k-space.com) - Stop by booth #304 to learn how kSA products will benefit your process and see a live demo of select instruments.
We have metrology systems for RHEED analysis, thin-film stress and strain, wafer and film temperature, surface roughness and quality, film thickness, deposition rate, wafer curvature, bow, warp, and tilt. Our sophisticated software analysis and reporting capabilities provide information on the characteristics of your end product or can give you online control during mass production to enhance yield.
What do you want to measure?
- kSA 400 - in situ film growth RHEED analysis
- kSA ACE - in situ atomic flux rate control
- kSA BandiT - in situ Band Edge Thermometry (BET)
- kSA Emissometer - ex situ wafer susceptor emissivity
- kSA ICE - in situ wafer temperature, reflectivity, growth rate, stress, and curvature
- kSA MOS - in situ 2D wafer curvature and stress
- kSA MOS UltraScan - ex situ wafer curvature, stress, tilt, bow height, warp
- kSA MOS ThermalScan - ex situ wafer curvature, stress, tilt, bow height, warp with temperature control
- kSA SpectR - in situ wafer film thickness, reflectivity, and optical constants
- kSA SpectraTemp - in situ absolute temperature
Brands: kSA 400;
kSA ACE;
kSA BandiT;
kSA Emissometer;
kSA ICE;
kSA MOS;
kSA MOS UltraScan;
kSA MOS ThermalScan;
kSA SpectR;
kSA SpectraTemp;