Heidelberg Instruments, Inc.
Heidelberg Instruments is one of the world leaders in the production of laser lithography systems, with more than thirty years of experience in maskless lithography and with an installation base of more than 850 systems worldwide. The company offers a variety of maskless pattern generator systems: these range from small and easy to use tabletop systems to highly complex photomask production equipment with exposure areas of several square meters. Heidelberg Instruments systems are installed in academic and industrial sites in more than 50 countries and are used in research, development and production. Applications include MEMS, BioMEMS, Nanotechnology, ASICS, TFT, Micro Optics and others.
Brands: μPG 101, MLA Series, DWL Series, and VPG series