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SAES CapaciTorr and NEXTorr pumps continue to be the benchmark in compact and powerful UHV/XHV pumps. The recently developed ZAO alloy has allowed for extending the operational pressure of NEGs to higher pressures with CapaciTorr HV and NexTorr HV pumps as well as for developing the CapaciTorr Z and NexTorr Z pumps that deliver 50 % more pumping speed in the same package as the existing CapaciTorr and NexTorr pumps. The ZAO based pumps also exhibit an even better mechanical stability, allowing them to be used in the cleanest applications without a risk of particulation.