MSP, a division of TSI®, greets you at AVS69!
We offer a complete line of vaporization products for liquid source vaporization in gas-phase processing like Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD). Our products are used in semiconductor device fabrication and industrial coating applications. Our line of MSP Turbo™ Vaporizers use a droplet vaporization, direct liquid injection (DLI) technique designed to meet modern demanding vaporization needs.
MSP's exclusive technology offers a broad range of advantages over older, more conventional techniques. The MSP Turbo™ Vaporizer applies advanced technology from aerosol science and thermo-dynamics to create a more refined solution to vaporization. In thin film applications, the stable and uniform vapor leads to a higher quality thin film and higher wafer yields.
Visit us at booth #705 to discover what's new in the world of CVD and ALD.