OkyayTech

Palo Alto,  CA 
United States
http://www.okyaytechald.com
  • Booth: 1617

OkyayTech: Keep calm and love ALD!

Born from a passion for research in the area of atomic layer deposition (ALD), OkyayTech is building custom ALD tools for university researchers and industrial research groups. Our philosophy is to design tools that can make ALD technology accessible for all researchers. Therefore, in our tool design we emphasize reducing complexity and promoting easy use for our customers while providing best-in-class performance and customization driven by research needs.

We excel in low temperature (<200C) ALD growth of very high quality III-Nitrides (AlN, GaN, TiN, InN etc). ALD technique could be a low temperature and scalable candidate to grow GaN. To date III-Nitride growth by ALD suffers from Oxygen contamination. Even the legacy tools on the market cannot completely eliminate this problem. Enter OkyayTech Layerava® for the rescue. The tool utilizes a large area high density hollow cathode source and a compact reactor design.

OkyayTech is building high performance state-of-the-art ALD tools for an attractive price point with university researchers in mind. 

Please inquire with us for a quote today!

Brands: ATOMRY, LAYERAVA, SIMURG, RADENIC