Oxford Instruments America
Oxford Instruments offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.
Our systems provide process solutions for the micro- and nanometre engineering of materials for MEMS, sensors, photonics and optoelectronics, discrete devices, and many other applications in micro- and nanotechnology.
These solutions are based on core technologies in:
- Plasma Etch & Deposition
- Atomic Layer Deposition (ALD) and Etching (ALE)
- Ion Beam Etch & Deposition
- Deep Silicon Etch
- Plasma Polish for substrates and epi layers
Products range from compact stand-alone systems for R&D, through to batch tools and up to cassette-to-cassette and clustered platforms for production processing.