Kyungwon Tech Co., Ltd.

Seongnam,  Gyeonggi 
Korea (South)
  • Booth: 922

Visit us at booth #922.

K-SPEED PACKAGE contains profile (K-SPEED) and bulk plasma (K-0DPLASMA) simulator using chemical reaction databae for palsma etching process.  

K-SPEED is a simulator for plassma etching profile to predict etching profiles and accompanied phenomena such as bowing, necking, etch stop, polymer passivation via effective computation taking into account various physical and chemical effects essentially which affect on dry etching process. 

K-0DPLASMA is a bulk plasma simulator to predict essential properties of the plasma through spatially zero dimensional approach. K-0DPLASMA provides plasma parameters such as ion flux, ion incidence angle, plasma density from practical environmental variables(power, pressure, gas flow etc.) of plasma processing.