MSP Corporation, A Division of TSI

Shoreview,  MN 
United States
http://www.tsi.com/msp
  • Booth: 818

Welcome to MSP, where we focus on vaporization products.

Since MSP's founding in 1985, one of our core focuses has been industry research. MSP, a division of TSI, offers a complete line of vaporization products for liquid source vaporization in gas-phase processing like Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD). Our products are used in semiconductor device fabrication and industrial coating applications. Our line of Turbo Vaporizers use a droplet vaporization, direct liquid injection (DLI) technique designed to meet modern demanding vaporization needs. This technique applies advanced technology from aerosol science and thermo-dynamics to create a more refined solution to vaporization.

Brands: MSP