Oxford Instruments America

Concord,  MA 
United States
  • Booth: 917

Oxford Instruments offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.
Our systems provide process solutions for the micro- and nanometre engineering of materials for MEMS, Sensors, Optoelectronics, Discrete Devices, and many other applications in micro- and nanotechnology.
These solutions are based on core technologies in:
- Plasma Etch & Deposition
- Atomic Layer Deposition (ALD) 
- Ion Beam Etch & Deposition
- Deep Silicon Etch Systems
- Magnetron sputtering
Products range from compact stand-alone systems for R&D, through to batch tools and up to cassette-to-cassette and clustered platforms for production processing.